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Ultra High
Purity Analytical Test Cart (UHP/ATC)
The Ultra-High Purity Analytical Test Cart is a mobile,
cleanroom-compatible system developed and field tested by
certified professionals at QAM. Fast and cost-effective,
the cart tests, certifies and trouble shoots for purity
at any UHP gas delivery connection in your system. The cart’s
advanced, self-contained design allows it to be
disconnected and moved to different test points without
purge gas interruption, sample line contamination, or power
interruption.
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Reasons
to Own a UHP/ATC |
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- It certifies moisture, oxygen,
and particle purity with a single test and records
the results for hard-copy or digital output.
- It increases productivity,
testing over 250% faster than conventional methods.
- It allows one sample to be
tested while another is being prepared.
- It eliminates power and purge
gas interruptions, as well as sample line contamination.
- It provides valuable trend
analysis utilizing the customized LabView data acquisition
software.
- It automatically integrates,
compares, and provides complete computerized reports
from test data within minutes.
- It helps meet strict quality
control demands necessary for ISO 9000 requirements.
- It is cleanroom-compatible,
constructed with polished stainless steel.
- It reduces response time,
instrument recovery time, and the cost of testing
to single-digit ppb levels.
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Small Package,
Big Benefits
The UHP/ATC is a prudent investment to help minimize expensive
down-time and yield loss in wafer fab plants. The cart incorporates
a patent-pending manifold
system that increases both the speed and cost-efficiency
of purity certification at ultra-high purity gas delivery
connections. The manifold uses an internal purified
argon gas source to purge the analytical instruments, maintaining
them at their lower detection limits (LDL) until the next
sample point is tested. This feature allows
the operator to disconnect and move the cart without interrupting
the purge gas supply. Moreover, the manifold eliminates
instrument contamination by integrating
a venting system that purges the sample line (up to 40 feet)
from point of connection. The cart has its own uninterrupted
power supply, which maintains internal power for up to 60
minutes when the cart is disconnected and wheeled between
test locations. This avoids the 8 to 10 hours of down-time
needed for instrments to recover from an unplanned power
interruption. The cart’s purchase price includes onsite
training and start-up by a QAM technician. QAM also provides
technicians to service and operate the cart on a continuing
contract basis.
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Specifications
The following list describes specifications for our standard
UHP/ATC. The test cart can also host analytical instruments
from a variety of manufacturers, and we offer custom configurations
to accommodate client preferences.
| Particle
Counter |
MET One model
1104 particle counter |
| Moisture Analyzer |
Meeco Turbo
2 moisture analyzer |
| Oxygen Analyzer |
Delta F nanotrace
oxygen analyzer |
| Cart Construction |
Polished stainless
steel |
| Pressure Monitor |
Panel mounted
span gauges to monitor on-board gas cylinders |
| Power Supply |
110 VAC primary,
UPS back-up power supply |
| Pneumatic Valves |
Nupro 7 RA
EP’d springless diaphragm valves with panel mounted
electronic switches |
| UHP Regulators |
7 RA EP’d
ap tech regulators |
| Pipe & Fittings |
7 RA EP’d
valex 401 spec. tube, cajon “px” micro-fit
fittings |
| Getter Purifier |
Onboard Ultra
Pure, Inc. model 600 purifier |
| Manifold |
QAM's patent-pending
manifold system |
| Leak Integrity tested |
Entire system
helium leak to 5 x 10 -10 ATM CC/SEC |
| Data Acquisition |
Pentium-based
laptop with customized version of LabView software |
| Cart Dimensions |
Height 50";
length 30"; width 20" |
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