1620 Valwood Parkway #128
Carrollton, TX 75006
Tel. +1 972-331-5800

 
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Ultra High Purity Analytical Test Cart (UHP/ATC)

The Ultra-High Purity Analytical Test Cart is a mobile, cleanroom-compatible system developed and field tested by certified professionals at QAM. Fast and cost-effective, the cart tests, certifies and trouble shoots for purity at any UHP gas delivery connection in your system. The cart’s advanced, self-contained design allows it to be
disconnected and moved to different test points without purge gas interruption, sample line contamination, or power interruption.

  Reasons to Own a UHP/ATC
  • It certifies moisture, oxygen, and particle purity with a single test and records the results for hard-copy or digital output.
  • It increases productivity, testing over 250% faster than conventional methods.
  • It allows one sample to be tested while another is being prepared.
  • It eliminates power and purge gas interruptions, as well as sample line contamination.
  • It provides valuable trend analysis utilizing the customized LabView data acquisition software.
  • It automatically integrates, compares, and provides complete computerized reports from test data within minutes.
  • It helps meet strict quality control demands necessary for ISO 9000 requirements.
  • It is cleanroom-compatible, constructed with polished stainless steel.
  • It reduces response time, instrument recovery time, and the cost of testing to single-digit ppb levels.

Small Package, Big Benefits
The UHP/ATC is a prudent investment to help minimize expensive down-time and yield loss in wafer fab plants. The cart incorporates a patent-pending manifold
system that increases both the speed and cost-efficiency of purity certification at ultra-high purity gas delivery connections. The manifold uses an internal purified
argon gas source to purge the analytical instruments, maintaining them at their lower detection limits (LDL) until the next sample point is tested. This feature allows
the operator to disconnect and move the cart without interrupting the purge gas supply. Moreover, the manifold eliminates instrument contamination by integrating
a venting system that purges the sample line (up to 40 feet) from point of connection. The cart has its own uninterrupted power supply, which maintains internal power for up to 60 minutes when the cart is disconnected and wheeled between test locations. This avoids the 8 to 10 hours of down-time needed for instrments to recover from an unplanned power interruption. The cart’s purchase price includes onsite training and start-up by a QAM technician. QAM also provides technicians to service and operate the cart on a continuing contract basis.


Specifications
The following list describes specifications for our standard UHP/ATC. The test cart can also host analytical instruments from a variety of manufacturers, and we offer custom configurations to accommodate client preferences.

Particle Counter MET One model 1104 particle counter
Moisture Analyzer Meeco Turbo 2 moisture analyzer
Oxygen Analyzer Delta F nanotrace oxygen analyzer
Cart Construction Polished stainless steel
Pressure Monitor Panel mounted span gauges to monitor on-board gas cylinders
Power Supply 110 VAC primary, UPS back-up power supply
Pneumatic Valves Nupro 7 RA EP’d springless diaphragm valves with panel mounted electronic switches
UHP Regulators 7 RA EP’d ap tech regulators
Pipe & Fittings 7 RA EP’d valex 401 spec. tube, cajon “px” micro-fit fittings
Getter Purifier Onboard Ultra Pure, Inc. model 600 purifier
Manifold QAM's patent-pending manifold system
Leak Integrity tested Entire system helium leak to 5 x 10 -10 ATM CC/SEC
Data Acquisition Pentium-based laptop with customized version of LabView software
Cart Dimensions Height 50"; length 30"; width 20"





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