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Ultra Pure Water Analytical Test Cart (UPW/ATC)

The Ultra-Pure Water Analytical Test Cart is a mobile, cleanroom-compatible system developed and field tested by certified professionals at QAM. It is the first system to provide testing, certifying, and trouble-shooting for any deionized water connection in your system. The cart’s advanced, self-contained design is capable of certifying a DI water system to eight separate criteria simultaneously. In addition, it offers a removable Teflon sample bomb that automatically collects a sample for advanced lab analysis if an impurity exceeds a preset level.

  Reasons to Own a UPW/ATC
  • It simultaneously performs eight critical analyses to certify sample points with a single test.*
  • It automatically collects a removable sample of DI water for advanced lab analysis if an impurity exceeds a preset level.
  • It dramatically reduces lost wafer production by eliminating DI water as a contamination threat.
  • It provides valuable trend analysis with a customized version of LabView data acquisition software
  • It automatically integrates, compares and provides complete computerized reports from the test data within minutes.
  • It helps meet strict quality control demands necessary for ISO 9000 requirements.
  • It is cleanroom-compatible, constructed with safe, non-outgassing polypropylene materials.
  • It allows users to validate the internal piping of each process tool.
  • It is compact, self-contained, and mobile, allowing it testing at any connection, from the cleanroom to sub fab distribution and the DI water plant.

Why There's No Better Way to Test DI Water Systems
The UPW/ATC offers the only economical approach to certifying and troubleshooting a DI water system or process tool at any remote location within your facility, including
inside the cleanroom. It is the first practical method for locating and solving contamination problems when they occur, quickly and efficiently. The cart incorporates a patentpending manifold system that increases both the speed and cost-efficiency of operations by allowing you to purge contamination from sample lines at the analyzer prior to testing. The manifold also supports testing one sample point while preparing for a second one. In addition, a major breakthrough feature incorporated in the cart is the removable Teflon sample bomb which solves the "time-lag" problem that occurs when technicians must determine the source of a TOC spike. Normally, by the time a testing reveals elevated TOC levels, the instruments have oxidized the original water sample, and it is too late to collect a useful sample. By automatically collecting a sample at the outset of analysis, the sample bomb retains the test water until the TOC analyzer reading is obtained. Alarm levels can be set for a number of contaminant conditions. The cart's purchase price includes onsite training and start-up by a QAM technician. QAM also provides technicians to service and operate the cart on a continuing contract basis.


Specifications
The following list describes specifications for our standard UPW/ATC. The test cart can also host analytical instruments from a variety of manufacturers, and we offer custom configurations to accommodate client preferences.

Particle Counter PMS model HSLis-m50-4-di
Particle Data System PMS model PDS-PB
Flow Controller Moore products model 63sd (m178)
Flow Meter Matheson series fm-1050 0-130 ml
Resistivity & Temp. Thorton model 222cr
Monitoring System  
TOC Analyzer Anatel model a-1000 analyzer Controller C80
    Sensor S10
    Printer Thermal
Manifold QAM’s patent-pending manifold system, including automated removable teflon sample bomb
Data Acquisition Pentium-based laptop with customized version of LabView, developed by QAM specifically for this application
Pressure Monitor Onboard Ultra Pure, Inc. model 600 purifier
Manifold Omega engineering px 176 transducer & display
Pneumatic Supply Internal mounted 15cf. aluminum nitrogen cylinder
Pipe & Fittings Purebond PFA tube and flaretech PFA fittings
Operating Voltage 110 vac
Cart Dimensions Height 57"; length 30"; width 20"

* The cart can simultaneously test for:
1. TOC (below 0.05 ppb)
2. Resistivity (to 18.3 meg ohm)
3. Particle Contamination (0.05 micron and larger)
4. Pressure5. Non-Volatile Residual [optional]
6. Dissolved Oxygen [optional]
7. Ozone (5 ppb) [optional]
8. Silica (1 ppb) [optional].






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