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Ultra Pure
Water Analytical Test Cart (UPW/ATC)
The Ultra-Pure Water Analytical Test Cart is a mobile, cleanroom-compatible
system developed and field tested by certified professionals
at QAM. It is the first system to provide testing, certifying,
and trouble-shooting for any deionized water connection
in your system. The cart’s advanced, self-contained
design is capable of certifying a DI water system to eight
separate criteria simultaneously. In addition, it offers
a removable Teflon sample bomb that automatically collects
a sample for advanced lab analysis if an impurity exceeds
a preset level.
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Reasons to Own
a UPW/ATC |
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- It simultaneously performs
eight critical analyses to certify sample points
with a single test.*
- It automatically collects
a removable sample of DI water for advanced lab
analysis if an impurity exceeds a preset level.
- It dramatically reduces lost
wafer production by eliminating DI water as a contamination
threat.
- It provides valuable trend
analysis with a customized version of LabView data
acquisition software
- It automatically integrates,
compares and provides complete computerized reports
from the test data within minutes.
- It helps meet strict quality
control demands necessary for ISO 9000 requirements.
- It is cleanroom-compatible,
constructed with safe, non-outgassing polypropylene
materials.
- It allows users to validate
the internal piping of each process tool.
- It is compact, self-contained,
and mobile, allowing it testing at any connection,
from the cleanroom to sub fab distribution and the
DI water plant.
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Why There's
No Better Way to Test DI Water Systems
The UPW/ATC offers the only economical approach to certifying
and troubleshooting a DI water system or process tool at
any remote location within your facility, including
inside the cleanroom. It is the first practical method for
locating and solving contamination problems when they occur,
quickly and efficiently. The cart incorporates a patentpending
manifold system that increases both the speed and cost-efficiency
of operations by allowing you to purge contamination from
sample lines at the analyzer prior to testing. The manifold
also supports testing one sample point while preparing for
a second one. In addition, a major breakthrough feature
incorporated in the cart is the removable Teflon sample
bomb which solves the "time-lag" problem that
occurs when technicians must determine the source of a TOC
spike. Normally, by the time a testing reveals elevated
TOC levels, the instruments have oxidized the original water
sample, and it is too late to collect a useful sample. By
automatically collecting a sample at the outset of analysis,
the sample bomb retains the test water until the TOC analyzer
reading is obtained. Alarm levels can be set for a number
of contaminant conditions. The cart's purchase price includes
onsite training and start-up by a QAM technician. QAM also
provides technicians to service and operate the cart on
a continuing contract basis.
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Specifications
The following list describes specifications for our standard
UPW/ATC. The test cart can also host analytical instruments
from a variety of manufacturers, and we offer custom configurations
to accommodate client preferences.
| Particle
Counter |
PMS model
HSLis-m50-4-di |
| Particle Data |
System PMS
model PDS-PB |
| Flow Controller |
Moore products
model 63sd (m178) |
| Flow Meter |
Matheson series
fm-1050 0-130 ml |
| Resistivity & Temp. |
Thorton model
222cr |
| Monitoring System |
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| TOC Analyzer |
Anatel model
a-1000 analyzer |
Controller |
C80 |
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Sensor |
S10 |
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Printer |
Thermal |
| Manifold |
QAM’s
patent-pending manifold system, including automated
removable teflon sample bomb |
| Data Acquisition |
Pentium-based
laptop with customized version of LabView, developed
by QAM specifically for this application |
| Pressure Monitor |
Onboard Ultra
Pure, Inc. model 600 purifier |
| Manifold |
Omega engineering
px 176 transducer & display |
| Pneumatic Supply |
Internal mounted
15cf. aluminum nitrogen cylinder |
| Pipe
& Fittings |
Purebond PFA
tube and flaretech PFA fittings |
| Operating Voltage |
110 vac |
| Cart Dimensions |
Height 57";
length 30"; width 20"
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