1620 Valwood Parkway #128
Carrollton, TX 75006
Tel. +1 972-331-5800

 
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Quality Monitoring System (QMS)


The Quality Monitoring System is developed and field-tested by certified professionals at QAM. It is a fixed analyzer system, which provides continuous on-line monitoring for yield-reducing impurities of bulk gas delivery systems. It
provides real-time status reports to any computer on the facility’s network, and it features an automatic paging system that notifies personnel if any of several pre-set contaminant alarm conditions occur.

  Reasons to Own a QMS
  • It enables immediate monitoring of contaminants that are otherwise only discovered through a reduction in yields.
  • It is cost-effective and provides risk management against expensive revenue loss caused by downtime.
  • It provides valuable trend analysis with a customized version of LabView data acquisition software.
  • It communicates with your facility’s existing computer network, allowing authorized users access to real-time and historical status reports from any remote location.
  • It automatically collects instrument data and archives it for future reference.
  • It features an automatic paging system that instantly notifies personnel of any pre-set contaminant alarm conditions.
  • It helps meet strict quality control demands necessary for ISO 9000 requirements.
  • It incorporates in-place automatic calibration, which allows users to easily verify that the instruments are functioning properly.
  • It allows manual override in case of a computer failure so that technicians can actuate the valves and still see instrument readings.

Risk Management Against Yield Loss
We all know the costs of downtime in a wafer fab plant. Any means of detecting a sudden spike in your bulk gases’ impurity levels before it affects yields—or worse
yet, shuts down the line—can literally save millions. Based on our industry-leading experience in quality control and quality assurance, we developed the QMS—a
front-line defense for detecting gas impurities before they become a major problem. Consisting of a customizable fixed analyzer rack, linked to a desktop PC, the
QMS is a vigilant sentry against unwanted moisture, oxygen, particles, and total hydrocarbons. It installs in the purifier room at the beginning of your system to validate the bulk gas, purifiers and filters. In addition, a second rack at the end of the system allows data to be compared between the sample points. A customized version of the LabView software captures and graphically displays data on the rack’s desktop PC. When attached to a Sun Ultra-Server, the QMS allows the information
to be available through any authorized remote location in your facility’s existing computer network. This allows your staff to either view current analytical results
or archived historical data. A built-in alarm system automatically pages personnel to alert to any significant changes in purity levels. In addition, we designed an inplace
automatic calibration system that verifies the rack’s instrumentation. Purchase includes on-site training and start-up, with a one-year warranty on equipment,
hardware, and software.

Specifications

The following list describes specifications for our standard QMS rack. The rack can also host analytical instruments from a variety of manufacturers, and we offer
custom configurations to accommodate client preferences.

Particle Counter Met One Model 1104 or Model 1107 CNC
Moisture Analyzer Ametek 5900 or Meeco Turbo 2
Oxygen Analyzer Delta F Platinum Nanotrace oxygen analyzer
Rack Vonstruction Rittel or Hoffman cabinets
Data Acquisition Pentium-based desktop PC with custom LabView software;
Sun Ultra-Server for interfacing with facility’s existing
computer network
Leak Integrity Entire system helium leak tested to 5 x 10 -10 ATM cc/sec
Pneumatic Values Nupro 7 RA EP’d springless diaphragm valves with panel-mountedelectronic switches
UHP Regulators 7 RA EP’d AP Tech regulators
Pipe and Fittings 7 RA EP’d Valex 401 spec. tube, Cajon “PX” Micro-fit Fittings
Getter Purifier Onboard Ultra Pure, Inc. Model 600 Purifier
Manifold QAM’s patent-pending manifold system

 



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