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Quality Monitoring System (QMS)
The Quality Monitoring System is developed and field-tested
by certified professionals at QAM. It is a fixed analyzer
system, which provides continuous on-line monitoring for
yield-reducing impurities of bulk gas delivery systems.
It
provides real-time status reports to any computer on the
facility’s network, and it features an automatic paging
system that notifies personnel if any of several pre-set
contaminant alarm conditions occur.
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Reasons to Own
a QMS |
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- It enables immediate monitoring
of contaminants that are otherwise only discovered
through a reduction in yields.
- It is cost-effective and
provides risk management against expensive revenue
loss caused by downtime.
- It provides valuable trend
analysis with a customized version of LabView data
acquisition software.
- It communicates with your
facility’s existing computer network, allowing
authorized users access to real-time and historical
status reports from any remote location.
- It automatically collects
instrument data and archives it for future reference.
- It features an automatic
paging system that instantly notifies personnel
of any pre-set contaminant alarm conditions.
- It helps meet strict quality
control demands necessary for ISO 9000 requirements.
- It incorporates in-place
automatic calibration, which allows users to easily
verify that the instruments are functioning properly.
- It allows manual override
in case of a computer failure so that technicians
can actuate the valves and still see instrument
readings.
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Risk Management Against Yield Loss
We all know the costs of downtime in a wafer fab plant.
Any means of detecting a sudden spike in your bulk gases’
impurity levels before it affects yields—or worse
yet, shuts down the line—can literally save millions.
Based on our industry-leading experience in quality control
and quality assurance, we developed the QMS—a
front-line defense for detecting gas impurities before they
become a major problem. Consisting of a customizable fixed
analyzer rack, linked to a desktop PC, the
QMS is a vigilant sentry against unwanted moisture, oxygen,
particles, and total hydrocarbons. It installs in the purifier
room at the beginning of your system to validate the bulk
gas, purifiers and filters. In addition, a second rack at
the end of the system allows data to be compared between
the sample points. A customized version of the LabView software
captures and graphically displays data on the rack’s
desktop PC. When attached to a Sun Ultra-Server, the QMS
allows the information
to be available through any authorized remote location in
your facility’s existing computer network. This allows
your staff to either view current analytical results
or archived historical data. A built-in alarm system automatically
pages personnel to alert to any significant changes in purity
levels. In addition, we designed an inplace
automatic calibration system that verifies the rack’s
instrumentation. Purchase includes on-site training and
start-up, with a one-year warranty on equipment,
hardware, and software.
Specifications
The following list describes specifications for our standard
QMS rack. The rack can also host analytical instruments
from a variety of manufacturers, and we offer
custom configurations to accommodate client preferences.
| Particle
Counter |
Met One Model
1104 or Model 1107 CNC |
| Moisture Analyzer |
Ametek 5900
or Meeco Turbo 2 |
| Oxygen Analyzer |
Delta F Platinum
Nanotrace oxygen analyzer |
| Rack Vonstruction |
Rittel or
Hoffman cabinets |
| Data Acquisition |
Pentium-based
desktop PC with custom LabView software;
Sun Ultra-Server for interfacing with facility’s
existing
computer network |
| Leak Integrity |
Entire system
helium leak tested to 5 x 10 -10 ATM cc/sec |
| Pneumatic Values |
Nupro 7 RA
EP’d springless diaphragm valves with panel-mountedelectronic
switches |
| UHP Regulators |
7 RA EP’d
AP Tech regulators |
| Pipe and Fittings |
7 RA EP’d
Valex 401 spec. tube, Cajon “PX” Micro-fit
Fittings |
| Getter Purifier |
Onboard Ultra
Pure, Inc. Model 600 Purifier |
| Manifold |
QAM’s
patent-pending manifold system |
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